SUBSTRATE TRANSFER EQUIPMENT AND SUBSTRATE PROCESSING SYSTEM USING THE SAME

Abstract: the present invention provides substrate transfer equipment. in an embodiment, the substrate transfer equipment includes: a transfer robot supporting the substrate; and a vertical actuating unit moving the transfer robot in an up-down direction, wherein the vertical actuating unit includes: a vertical frame having a slit formed with a longitudinal direction thereof provided in the up-down direction, and having a vertical space formed therein; an exhaust duct having an exhaust space connected with the vertical space and provided on a side of the vertical frame; and an actuating member positioned in the vertical space and moving a supporting unit in the up-down direction, wherein the exhaust duct is provided such that a first side is open toward the vertical space.

Inventor(s): Ha Neul YOO, Jae Hun JEONG, Cheol Yong SHIN, Doo Hyun BAEK

CPC Classification: B65G47/90 (Devices for picking-up and depositing articles or materials)

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