20250214245. Substrate Tr (KAWASAKI JUKOGYO KABUSHIKI KAISHA)
SUBSTRATE TRANSFER APPARATUS AND METHOD OF CALIBRATING SUBSTRATE TRANSFER APPARATUS
Abstract: a method of calibrating a substrate transfer apparatus according to one or more embodiments may include: fixing a substrate transfer apparatus; measuring the operation of the fixed substrate transfer apparatus; generating eigendata relating to an operation of the fixed substrate transfer apparatus; and storing the eigendata in the substrate transfer apparatus.
Inventor(s): Shinya KITANO, Weston WAHL, Ming ZENG, Simon JEYAPALAN, Iori KURATA
CPC Classification: B25J9/1692 ({Calibration of manipulator})
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