CONFORMAL FLEXIBLE POLISHING METHOD FOR MICRO LENS ARRAY MOLD

Abstract: the present invention relates to a conformal flexible polishing method for a micro lens array mold, which realizes conformal flexible polishing. solution : a magnet is installed below a workpiece so that the prepared magnetic slurry is fitted with the surface of the workpiece under the action of magnetic field force to produce a contact pressure; a magnetic polishing tool is installed above the workpiece, and the tool is magnetized; the polishing tool rotates, and the magnetic slurry on the tip end of the tool forms a spherical polishing head. solution : a shear thickening slurry is used, a ball end tool is installed above the workpiece, and the shear thickening slurry is driven through the high-speed rotation of the ball end tool to rotate and produce a relative shear motion so as to carry out polishing under the action of the shear thickening effect.

Inventor(s): Jiang GUO, Renke KANG, Pengfei ZHANG, Linguang LI, Zhe YANG, Dongming GUO

CPC Classification: B24B1/005 (Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes)

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