APPARATUS FOR PROCESSING SUBSTRATE, METHOD OF CONTROLLING APPARATUS FOR PROCESSING SUBSTRATE, AND STORAGE MEDIUM WITH PROGRAM STORED THEREIN

Abstract: an apparatus for processing a substrate is configured to generate a transfer schedule by adding a positive or negative margin time to a processing time of a first process set in a recipe, wherein the margin time is calculated by a learning network or a statistical calculation method using actually measured processing times obtained by actually performing the first process with regard to a plurality of substrates in a first processing tank. in addition to or in place of this configuration, the apparatus may be configured to estimate an estimated process end time from a detection value obtained from a sensor, and when it is determined that the estimated process end time is behind a scheduled transfer start time, to correct the scheduled transfer start time to the estimated process end time and adjust the transfer schedule in accordance with the corrected scheduled transfer start time.

Inventor(s): Ryuya KOIZUMI, Shunsuke KAGAYA, Shaunak GHATPANDE

CPC Classification: C25D21/12 (Process control or regulation (controlling or regulating in general ))

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