DEPOSITION EQUIPMENT

Abstract: a deposition equipment includes a chamber, a deposition source disposed inside the chamber, a mask disposed between a first substrate and the deposition source inside the chamber, and a mask support disposed between the deposition source and the mask and supporting at least a portion of the mask. the mask includes a plurality of cell areas and a mask frame area excluding the plurality of cell areas, the mask frame area includes a mask rib area separating the plurality of cell areas and an outer frame area disposed at an outermost periphery of the mask, the mask support includes a plurality of support ribs, each supporting the mask rib area and having a cross-sectional structure having a taper angle, and the taper angle of each of the plurality of support ribs are different from each other.

Inventor(s): Sung Woon KIM

CPC Classification: C23C16/042 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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