LIQUID METAL ALLOY FEED MATERIALS FOR ION IMPLANTATION

Abstract: liquid metal alloy precursor compositions and their use as liquid metal alloy ion sources for ion implantation of non-traditional source elements generally include liquid metal alloy precursor compositions having a melting point less than a maximum operating temperature for the ion implantation system of about 550� c. the liquid metal alloy precursor composition generally provides homogenous or heterogenous liquid metal alloys having eutectic melting temperature less than about 550� c. the heterogenous liquid metal alloy compositions include a flux metal having a relatively low melting point and at least one additional metal that is at least partially soluble in the flux metal at a selected operating temperature of less than about 550� c. the liquid metal alloy precursor compositions are suitable for use in ion implantation systems configured for liquid metal ion sources (lmis) or capillary drive sources. also disclosed are processes for implanting liquid metal alloy ion source precursor compositions.

Inventor(s): Vladimir ROMANOV, Neil COLVIN, Ed MOORE, Udo VERKERK, Neil BASSOM, Kevin WENZEL

CPC Classification: C23C14/48 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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