NON-CONTACT PAD CLEANING APPARATUS

Abstract: a non-contact pad cleaning apparatus capable of removing foreign matter from minute holes formed in a polishing surface of a polishing pad is disclosed. the non-contact pad cleaning apparatus includes: a turntable configured to rotate the polishing pad; a plurality of two-fluid nozzles disposed above the polishing pad; and a liquid supply line and a gas supply line coupled to the plurality of two-fluid nozzles. the plurality of two-fluid nozzles are arranged along a radial direction of the polishing pad. the plurality of two-fluid nozzles have outlet ports which are inclined obliquely with respect to a reference line extending in the radial direction of the polishing pad when viewed from a direction perpendicular to the polishing surface of the polishing pad.

Inventor(s): Erina BABA, Nozomu KUWABARA

CPC Classification: B24B53/017 (MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth , of screw-threads ; by electro-erosion ; abrasive or related blasting ; tools for grinding, buffing or sharpening ; polishing compositions ; abrasives ; electrolytic etching or polishing ; grinding arrangements for use on assembled railway tracks ); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS)

Search for rejections for patent application number 20250205850