SEPARATION START POINT FORMING METHOD AND SEPARATION METHOD

Abstract: a method is of forming, inside a workpiece having first and second surfaces, a separation start point for separating the workpiece into the first and second surface sides. the method includes: holding the workpiece to expose the first surface; setting a specific region on the first surface; and repeating processing feed and indexing feed to form modified portions inside the workpiece and form a separation start point including the modified portions. the processing feed is of relatively moving a condensing point of a laser beam in a processing feed direction with respect to the workpiece while emitting the laser beam toward the first surface with the condensing point positioned inside the workpiece to form a strip-shaped modified portion inside the workpiece. the indexing feed is being of relatively moving the condensing point in an indexing feed direction, orthogonal to the processing feed direction, with respect to the workpiece.

Inventor(s): Kazuya HIRATA

CPC Classification: B23K26/53 (SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM (making metal-coated products by extruding metal ; building up linings or coverings by casting ; casting by dipping ; manufacture of composite layers by sintering metal powder ; arrangements on machine tools for copying or controlling ; covering metals or covering materials with metals, not otherwise provided for ; burners ))

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