SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Abstract: disclosed is a method of processing a substrate, the method including: a substrate processing operation of processing a substrate by supplying a treatment liquid to a substrate loaded into a processing space of a processing container; and a container cleaning operation of cleaning an interior of the processing container in a state where the substrate is unloaded from the processing space, in which the container cleaning operation includes: a periodic cleaning operation of periodically cleaning the interior of the processing container; and an emergency cleaning operation of temporarily cleaning the interior of the processing container when a set condition is satisfied.

Inventor(s): So Young PARK, Bok Kyu LEE

CPC Classification: B08B9/08 (Cleaning containers, e.g. tanks)

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