PARTICLE REMOVAL SYSTEM AND METHOD OF CONTROLLING PARTICLE REMOVAL SYSTEM

Abstract: a particle removal system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles. the particle removal system includes a charger a robot, and a controller. the controller is configured to control operation of the robot to electrostatically charge the particle absorption tool so as to build up the static electric charge by using the charger.

Inventor(s): Haruhiko TAN, Nobuyasu SHIMOMURA, Theodore PHILLIBER, Ryan LE, Avish Ashok BHARWANI, Simon JEYAPALAN

CPC Classification: B08B6/00 (Cleaning by electrostatic means (domestic cleaning implements functioning electrostatically ; cleaning of grooved record carriers ))

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