CHARGING SYSTEM AND METHOD OF CONTROLLING CHARGING SYSTEM

Abstract: a charging system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles; a charger arranged in operating space of a robot arm that is configured to convey a substrate in an interior of a substrate conveyor, and configured to electrostatically charge the particle absorption tool so as to build up the static electric charge.

Inventor(s): Haruhiko TAN, Avish Ashok BHARWANI, Theodore PHILLIBER, Ryan LE, Simon JEYAPALAN, Nobuyasu SHIMOMURA

CPC Classification: B08B6/00 (Cleaning by electrostatic means (domestic cleaning implements functioning electrostatically ; cleaning of grooved record carriers ))

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