CHARGING SYSTEM AND METHOD FOR CONTROLLING CHARGING SYSTEM

Abstract: a charging system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles; a charger configured to electrostatically charge the particle absorption tool so as to build up the static electric charge; and a charger container configured to accommodate the charger, arranged in a place where a foup for accommodating substrates is arranged, and having an opening that is opened toward an interior of a substrate conveyor.

Inventor(s): Haruhiko TAN, Simon JEYAPALAN, Theodore PHILLIBER, Ryan LE, Avish Ashok BHARWANI, Nobuyasu SHIMOMURA

CPC Classification: B08B6/00 (Cleaning by electrostatic means (domestic cleaning implements functioning electrostatically ; cleaning of grooved record carriers ))

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