APPARATUS FOR TREATING SUBSTRATE AND VALVE ASSEMBLY USED IN THE SAME

Abstract: disclosed is a substrate treating apparatus including a valve assembly. the valve assembly includes a body and a diagram, and the body includes an inlet port through which the treatment liquid is introduced from a liquid supply source side, an outlet port through which the treatment liquid is discharged to the liquid treating chamber side, and a recirculation port through which the treatment liquid returns to the liquid supply source side. the diaphragm opens and closes a flow path of the treatment liquid flowing toward the outlet port side. the treatment liquid introduced into the body of the valve assembly is supplied to a nozzle through the outlet port or recovered to the liquid supply source side through the recirculation port.

Inventor(s): Ju Dong LEE, Hyun Jin YANG, Seung Tae YANG

CPC Classification: B05C11/1026 (APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles ; plant for applying liquids or other fluent materials to objects by electrostatic spraying ))

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