PIEZOELECTRIC ACTUATOR, LIQUID DISCHARGE HEAD AND RECORDING DEVICE

Abstract: a piezoelectric actuator includes a piezoelectric element including a vibrating plate, an internal electrode, a piezoelectric ceramic body, a surface electrode, a connection electrode, and a groove portion. the internal electrode is on a first surface of the vibrating plate. the piezoelectric ceramic body is on a second surface of the internal electrode. the surface electrode is on a third surface of the piezoelectric ceramic body. the connection electrode is on the third surface and connected to the surface electrode. in a plan view of the piezoelectric element perpendicular to the third surface, the groove portion is around or inside the surface electrode and extends corresponding to the surface electrode. the groove portion includes a deep groove portion equal to or deeper than a depth reaching the internal electrode and a shallow groove portion closer to the connection electrode than the deep groove portion and shallower than the depth.

Inventor(s): Ryota KAKU, Kazuhiro ARIKI, Wataru IKEUCHI, Daisuke HOZUMI

CPC Classification: B41J2/14233 ({of film type, deformed by bending and disposed on a diaphragm})

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