20250196281. Heated Dynamic Seal Ro (Applied Materials, .)
Heated Dynamic Seal Rotary Union for Delivery of Cryogenic Fluid
Abstract: a rotary union that includes one or more lip seals is disclosed. the rotary union includes a rotary union shaft and a rotary union housing that surrounds the rotary union shaft. heaters are disposed on the outer surfaces of the rotary union shaft and the rotary union housing. additionally, a low thermal conductivity path is created between the center portion of the rotary union housing, where the lip seals are located, and the base of the rotary union housing, which contacts the cryogenic fluid. this low thermal conductivity path allows the lip seals to remain sufficiently warm so as to ensure good seal performance and reduced leakage.
Inventor(s): Robert J. Mitchell, Guillermo Colom
CPC Classification: B23Q11/10 (Arrangements for cooling or lubricating tools or work (incorporated in tools, see the relevant subclass for the tool {, e.g. , , , ; for circular saw blades , for cooling grinding surfaces }))
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