LASER PROCESSING EQUIPMENT AND LASER PROCESSING METHOD

Abstract: a laser processing equipment includes a laser unit and a carrier. the laser unit includes a pulsed laser light source, a vibration mirror, a mask, and a focusing module. the pulsed laser light source provides a pulsed laser beam. the vibration mirror turns the pulsed laser beam. the mask receives the pulsed laser beam. the mask has multiple openings distributed along a first direction. the openings are used to allow the pulsed laser beam to pass through. the focusing module respectively focuses the pulsed laser beam passing through the openings into multiple laser spots distributed along the first direction. the carrier carries multiple processing elements. the processing elements are disposed corresponding to distribution positions of the laser spots along the first direction. a laser processing method is also provided.

Inventor(s): Yen-Mu Chen, Chih-Chien Tung

CPC Classification: B23K26/066 (by using masks)

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