ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTOR MANUFACTURING

Abstract: a method includes receiving data indicating an update to a substrate fabrication system to operate according to one or more process procedures. the update includes at least one of i.) an alteration of a scheduled operational mode of a support asset of the substrate fabrication system to a shared operational mode; or ii.) a modification of a first gas to a second gas used by the substrate fabrication system. the method further includes inputting the data into a digital replica configured to estimate environment resource usage data indicative of an amount of one or more resources consumed. the method further includes receiving estimated environmental resource usage data output from the digital replica corresponding to performing the one or more process procedures by the substrate fabrication system incorporating the update. the method further includes providing the estimated environmental resource usage data for display on a graphical user interface.

Inventor(s): Ala Moradian, Umesh Madhav Kelkar, Elizabeth Neville, Orlando Trejo, Sergey Meirovich, Kartik B. Shah, Shreyas Suresh Kher

CPC Classification: G05B19/188 (CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables ; systems for regulating electric or magnetic variables ; control devices or systems insofar as characterised by mechanical features only ))

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