METHOD OF MANUFACTURING PLATED ARTICLE

Abstract: a method for producing a plated article on a metal layer of a substrate which has the metal layer on a surface thereof, including forming a resist pattern to be used as a template for forming a plated article, using a photosensitive composition which includes a sulfur-containing compound and/or a nitrogen-containing compound each having a predetermined structure; before the plated article is formed, subjecting a surface made of metal exposed from a nonresist portion of the resist pattern to ashing; and detaching the resist pattern with a detaching liquid including a basic compound and then etching the metal layer which is on the substrate surface and on which the plated article has not been formed after the plated article formation.

Inventor(s): Daisuke Ojima, Yasushi Kuroiwa

CPC Classification: G03F7/11 (having cover layers or intermediate layers, e.g. subbing layers {( - , take precedence)})

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