VACUUM PRESSURE SENSOR COMPRISING A CONTAMINATION SHIELD

Abstract: a vacuum pressure sensor comprises an electrode and a diaphragm forming a capacitive structure. the sensor further comprises a housing defining a sensor cavity and comprising a support structure configured to support the capacitive structure within the sensor cavity. the diaphragm resides in a diaphragm plane and the electrode extends substantially parallel to the diaphragm on a first side of the diaphragm plane. the housing further comprises an inlet disposed on a second side of the diaphragm plane and configured to be in fluid communication with a measured environment. the sensor further comprises a contamination shield, disposed in the sensor cavity between the inlet and the capacitive structure, wherein the contamination shield is configured to provide at least one fluid communication path from the inlet to the diaphragm, and wherein each of the at least one fluid communication path crosses the diaphragm plane at least twice.

Inventor(s): Gino A. PINTO

CPC Classification: G01L9/0072 (Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements {( takes precedence)}; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means (measuring differences of two or more pressure values ; measuring two or more pressure values simultaneously ))

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