INERTIAL SENSOR AND METHOD FOR MANUFACTURING THE SAME

Abstract: an inertial sensor includes a mounting substrate, a vibrator, and a connection portion. the mounting substrate has electrodes arranged apart from each other. the vibrator has a hollow rim, and a mounting portion having a mounting surface facing the mounting substrate. the connection portion is disposed between the mounting surface of the mounting portion and the mounting substrate to connect therebetween. the electrodes are arranged in a ring shape around the rim at a distance from the rim. the connection portion has a plurality of linear portions extending linearly along node directions, which are directions along substrate radial directions centering on a mounting center of a connection area between the mounting surface and the mounting substrate and passing through positions of vibration nodes of the rim that vibrates in a resonant mode of n=k, in which k is an integer of 2 or more.

Inventor(s): HIDEAKI NISHIKAWA, YUSUKE KAWAI, ATSUSHI MIZUTANI, AKIRA WADA, KATSUAKI GOTO, KEITARO ITO, SHOTA HARADA

CPC Classification: G01C19/5783 (MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level ; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves ))

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