Measuring Device, Machining System and Method for Adjusting a Measuring Device

Abstract: the invention relates to a measuring device () for a machining system () for machining a workpiece () using a high-energy machining beam (), wherein the measuring device () comprises a beam generating unit () configured to generate a sample beam () and a reference beam () that can be caused to interfere for the performance of optical interference measurements such as optical coherence tomography; a sample arm () that is optically connected to the beam generating unit () and in which the sample beam () is optically guided so that it can be projected onto the workpiece (); a reference arm () that is optically connected to the beam generating unit () and in which the reference beam () is optically guided; and a measuring interface () that can be used to couple the sample beam () into the machining beam (); the measuring device () comprising a base module () and an interchangeable module () that is connectable or connected thereto. the interchangeable module () comprises a beam guiding portion () that includes optical components () for guiding the sample beam () and/or the reference beam () and that is configured to form a central portion () of the sample arm () and/or the reference arm (a).

Inventor(s): Eckhard Lessmüller, Christian Truckenbrodt

CPC Classification: G01B9/02031 (Interferometers)

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