HIGH-EFFICIENCY TARGET FOR AN ION SOURCE

Abstract: a target body can define a central bore along a central axis of the target body. the central axis extends between two planar ends of the target body. the target body has an effective density of less than 0.5 in region around the central bore. the target body can be a metal-doped ceramic material including aln doped with aluminum or a homogenous ceramic material including aln or aloand may be fabricated using additive manufacturing.

Inventor(s): Joshua Abeshaus, Neil Bassom, Neil Colvin, Camilla Zimmerman, Paul Silverstein, Makita Erni

CPC Classification: C23C14/3414 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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