POLISHING AGENT AND POLISHING METHOD

Abstract: a polishing agent for polishing a surface to be polished containing indium tin oxide, the polishing agent containing abrasive grains, at least one dicarboxylic acid component selected from the group consisting of a dicarboxylic acid having 3 or less carbon atoms and a salt thereof, and water, in which the abrasive grains contain silica and have a positive zeta potential, and a ph is 9.0 or less.

Inventor(s): Masayuki HANANO, Junpei KAWAKITA, Kouji HAGA

CPC Classification: C09G1/02 (POLISHING COMPOSITIONS (French polish ); SKI WAXES)

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