LASER PROCESSING SYSTEM, LASER PROCESSING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

Abstract: a laser processing system includes a laser apparatus that outputs a deep ultraviolet laser beam in response to a light emission trigger signal, an optical isolator including a polarizer, a deep ultraviolet light transmitting element, and a piezoelectric element connected to the deep ultraviolet light transmitting element, and a processor that supplies, to the piezoelectric element, a drive signal having a voltage changeable with a natural frequency of the deep ultraviolet light transmitting element, and transmits the light emission trigger signal to the laser apparatus using the natural frequency or a frequency obtained by dividing the natural frequency as a repetition frequency so that the deep ultraviolet light transmitting element functions as a � wave plate by stress birefringence due to force from the piezoelectric element, and processing is performed by irradiating a workpiece with the laser beam from the optical isolator.

Inventor(s): Yuki TAMARU

CPC Classification: B23K26/066 (by using masks)

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