SINGLE PHOTON AVALANCHE DIODE ARRAY, RECEIVING SENSOR AND LIDAR

Abstract: a single-photon avalanche diode array, a receiving sensor, and a lidar are provided. the single-photon avalanche diode array includes: at least two spad units arranged in an array, at least two micro lenses corresponding one-to-one with the at least two spad units, at least two front metal wiring layers corresponding one-to-one with the at least two spad units, a back metal grid connecting a spad unit with its corresponding external electrode, a first dielectric layer disposed between each micro lens and each spad unit, a second dielectric layer disposed between the at least two spad units and the at least two front metal wiring layer, and each front metal wiring layer is electrically connected to its corresponding spad unit through a contact metal wire.

Inventor(s): Enfei CHAO, Chunqiu XIA, Guofeng YAO

CPC Classification: H10F39/811 (No explanation available)

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