IMAGE SENSOR AND ELECTRONIC SYSTEM INCLUDING THE SAME

Abstract: an image sensor includes a plurality of unit pixels on a substrate, and a pixel isolation structure extending through the substrate in a vertical direction and defining the plurality of unit pixels, where the pixel isolation structure includes a line isolation portion linearly extending along a side of and between each of two adjacent unit pixels of the plurality of unit pixels, a corner isolation portion contacting a corner of each of at least two adjacent unit pixels of the plurality of unit pixels, a first conductive pattern surrounding a first air gap in the line isolation portion, and a first insulating pattern surrounding the first air gap and the first conductive pattern in the line isolation portion, and a width of the first insulating pattern in a lateral direction varies along the vertical direction.

Inventor(s): Kooktae KIM

CPC Classification: H10F39/807 (No explanation available)

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