20250185281. Semiconductor (Renesas Electronics)
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SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Abstract: a semiconductor substrate includes a p-type substrate region, an n-type buried layer on the p-type substrate region, and a p-type semiconductor layer on the n-type buried layer. in the semiconductor layer, an n-type semiconductor region is formed so as to surround a transistor in plan view and to reach the n-type buried layer from a main surface of the semiconductor substrate. a dti region is formed so as to penetrate through the n-type semiconductor region and the n-type buried layer and reach the p-type substrate region.
Inventor(s): Makoto KOSHIMIZU, Tohru KAWAI, Yasutaka NAKASHIBA, Tomonari YAMAGUCHI
CPC Classification: H10D30/65 (No explanation available)
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