METHOD AND SYSTEM OF OPTICAL NANOSCALE ALIGNMENT

Abstract: a method and a system of optical nanoscale alignment, a sample support comprises a first holder for a first chip and a second holder for a second chip; the first and second chips are positioned in a facing relationship on a first and a second surface of the sample respectively, and a dual light source casts a coherent light beam on the sample from a first surface and an incoherent beam on the sample from a second, opposite, surface thereof; a positioning unit controls the movement of the first chip and controls the movement of the second chip according to isotropic interference fringes generated by the dual light in reflection mode in images captured by an imaging unit, indicating of pitch and yaw angle, light from the dual light source in transmission mode providing bright field illumination while x, y, and rotation alignments are performed.

Inventor(s): Jinyang LIANG, Siqi WANG, Cheng JIANG, Robert PETERS

CPC Classification: H01L21/681 (for positioning, orientation or alignment)

Search for rejections for patent application number 20250183080