WAFER CONTAINER AND WAFER SUPPORT

Abstract: in a wafer container, cell rings of a container body each include an outer frame, a support protruding inward from the outer frame, a first guide and a second guide inside the outer frame and facing each other in a first direction, and a pair of third guides inside the outer frame and facing each other in a second direction. the container body includes a first flow path to guide inert gas upward, a horizontal flow path to guide the inert gas in a horizontal direction, and a second flow path to guide the inert gas downward. in the container body, the pair of third guides prevents the inert gas in the horizontal flow path from deviating in the second direction.

Inventor(s): Taito UENOYAMA, Yumiko KATO, Naoto MIYASHITA

CPC Classification: H01L21/67346 ({specially adapted for supporting large square shaped substrates (containers and packaging elements for glass sheets , transporting of glass products during their manufacture )})

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