CONFIGURABLE AND MODULAR LOAD LOCK CHAMBER SYSTEMS AND METHODS OF MAKING LOAD LOCKS FOR SEMICONDUCTOR PROCESSING SYSTEMS

Abstract: a load lock arrangement includes a load lock body that has an upper plate defining an upper accessory seat at the upper accessory seat aperture, an intermediate plate spaced apart from the upper plate defining an intermediate accessory seat at the intermediate accessory seat aperture, and a lower plate separated from the upper plate by the intermediate plate defining a lower accessory seat at the lower accessory seat aperture. a first accessory plate is fixed to the upper accessory seat and a second accessory plate is fixed to the lower accessory seat. the upper accessory seat aperture, the intermediate accessory seat aperture and the lower accessory seat aperture are vertically aligned to form a load lock body aperture. semiconductor processing systems and methods of making load lock arrangements are also described.

Inventor(s): Samer Banna

CPC Classification: H01L21/67201 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se , , ; simple temporary support means, e.g. using adhesives, electric or magnetic means , ; apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto ;)})

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