20250183063. Cooling Station (Applied Materials, .)
COOLING STATION
Abstract: a cooling station is provided including one or more cooling plates configured to support a substrate. each cooling plate of the one or more cooling plates can include a monolithic body and one or more channels within the monolithic body that traverse an interior volume of the cooling plate. these channels can be configured to circulate a coolant within the cooling plate, wherein the coolant is to extract heat from the supported substrate that may be resting on top of the cooling plate. in some cases, a cross sectional shape of the one or more channels may be at least one of rectangular, circular, pentagonal, polygonal, hexagonal, or a gyroid.
Inventor(s): Pandu Maddherla, Sushant S. Koshti, Devendra Channappa Holeyannavard, Paul Benjamin Reuter, Arunkumar Ramachandraiah, Sandesh Doddamane Ramappa, Mallanagouda Patil, James Christopher Hansen, Raghu Ram Sunkavilli, Sivakumar Ramalingam, Michael C. Kuchar, Ramon Zaragoza, Sridhar Srinivasan Chari
CPC Classification: H01L21/67109 ({mainly by convection})
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- Patent Applications
- Applied Materials, Inc.
- CPC H01L21/67109
- Pandu Maddherla of Bengaluru IN
- Sushant S. Koshti of Sunnyvale CA US
- Devendra Channappa Holeyannavard of Bangalore IN
- Paul Benjamin Reuter of Austin TX US
- Arunkumar Ramachandraiah of Bengaluru IN
- Sandesh Doddamane Ramappa of Bangalore IN
- Mallanagouda Patil of Bangalore IN
- James Christopher Hansen of Sunnyvale CA US
- Raghu Ram Sunkavilli of Yellamilli IN
- Sivakumar Ramalingam of Bangalore IN
- Michael C. Kuchar of Georgetown TX US
- Ramon Zaragoza of San Jose CA US
- Sridhar Srinivasan Chari of Bangalore IN