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20250183019. Programmable Precision Etch (BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM)

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PROGRAMMABLE PRECISION ETCHING

Abstract: a system and method for thinning a group of two or more dies. an etch gas chemistry is introduced into a plasma generator. furthermore, plasma is generated using the etch gas chemistry by the plasma generator. the two or more dies placed within an etch chamber are then etched to thin the two or more dies until the two or more dies achieve a desired thickness using the plasma. furthermore, a spatially variable closed loop control of etch rates of the etching is implemented to provide spatially variable etch rates during the thinning of the two or more dies.

Inventor(s): Sidlgata V. Sreenivasan, Anant Jain, Paras Ajay

CPC Classification: H01J37/32935 (Gas-filled discharge tubes (heating by discharge ))

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