SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

Abstract: a detector may be provided with an array of sensing elements. the detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. the circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. various counting modes may be used. counting may be based on energy ranges. numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. the circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. size of the sensing element may be determined based on criteria for enabling charged particle counting.

Inventor(s): Yongxin WANG, Zhonghua DONG, Rui-Ling LAI, Kenichi KANAI

CPC Classification: H01J37/244 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps ; arc lamps with consumable electrodes ; particle accelerators ))

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