COMPUTER SYSTEM, DIMENSION MEASURING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM

Abstract: a computer system for extracting, from image data, coordinate information on base points for measuring a dimension of a desired portion of a pattern, and measuring the dimension by using the coordinate information, the computer system including a preprocessing unit configured to allow training by matching all of the samples by setting a base point insufficient in annotation data as an insufficient measurement portion and shielding the insufficient measurement portion on the image data for the sample in which coordinate values of only a part of the base points are described, the preprocessing unit is also configured to allow learning and is trained in advance by using training data in which the image data is set as an input and the coordinate information is set as an output, and the preprocessing unit extracts the coordinate information and the dimension for new image data input for learning.

Inventor(s): Yutaka OKUYAMA, Takeshi OHMORI

CPC Classification: G06T7/0004 ({Industrial image inspection})

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