TEMPERATURE CONTROL DEVICE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD

Abstract: to provide a temperature control device, a substrate processing apparatus, and a temperature control method that improve accuracy and responsiveness of temperature control. the temperature control device for controlling a temperature of a temperature controller by circulating a fluid through the temperature controller, includes: a first temperature adjuster for controlling the fluid to a first temperature, a second temperature adjuster for controlling the fluid controlled to the first temperature to a second temperature, a first temperature-control flow path provided between the first temperature adjuster and the second temperature adjuster, a second temperature-control flow path provided between the second temperature adjuster and the temperature controller, and a return flow path provided between the temperature controller and the first temperature adjuster.

Inventor(s): Masaru ISAGO

CPC Classification: G05D23/00 (Control of temperature)

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