20250181067. Fault Event Recovery I (Applied Materials, .)
FAULT EVENT RECOVERY IN MULTI-SLOT PROCESSING CHAMBERS
Abstract: a method includes causing initiation of a first process recipe in a first slot of a multi-slot processing chamber and a second process recipe in a second slot of the multi-slot processing chamber. responsive to determining a fault event associated with the first slot, the method further includes causing interruption of one or more first components of the first slot during running of the first process recipe while continuing operation of one or more second components of the first slot during the running of the first process recipe.
Inventor(s): Mitesh Harshad Sanghvi, Albert Liu, Jeevan Shanbhag, Venkatanarayana Shankaramurthy, Allan He, Rana Howlander, Sarah Michelle Bobek, Abdul Aziz Khaja
CPC Classification: G05B23/0291 (CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables ; systems for regulating electric or magnetic variables ; control devices or systems insofar as characterised by mechanical features only ))
Search for rejections for patent application number 20250181067
- Patent Applications
- Applied Materials, Inc.
- CPC G05B23/0291
- Mitesh Harshad Sanghvi of Dublin CA US
- Albert Liu of Fullerton CA US
- Jeevan Shanbhag of Dublin CA US
- Venkatanarayana Shankaramurthy of San Jose CA US
- Allan He of Fremont CA US
- Rana Howlander of San Jose CA US
- Sarah Michelle Bobek of Santa Clara CA US
- Abdul Aziz Khaja of San Jose CA US