METHODS AND MECHANISMS FOR GENERATING A DATA COLLECTION PLAN FOR A SEMICONDUCTOR MANUFACTURING SYSTEM

Abstract: a method includes receiving, via a graphical user interface (gui), user input selecting one or more tool data items from the set of tool data items and adding configuration data associated with the one or more tool data items to a data collection plan. in a semiconductor manufacturing system, corresponding identification data is located that is indicative of whether a respective component of a semiconductor manufacturing system associated with respective configuration data is at least one of included in the semiconductor manufacturing system or is functional in the semiconductor manufacturing system. a subset of the configuration data for which corresponding identification data was not located removed from the data collection plan and one or more data collection operations are executed at the semiconductor manufacturing system based on the data collection plan.

Inventor(s): William Kazmierski, Joseph Blanco, Balaji Pasupathy

CPC Classification: G05B19/188 (CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables ; systems for regulating electric or magnetic variables ; control devices or systems insofar as characterised by mechanical features only ))

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