DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS

Abstract: a drive device for driving at least one actuator for actuating an optical element of an optical system, wherein the drive device comprises an end stage configured to boost an input voltage using a quiescent current of the end stage to a drive voltage for the actuator. the drive device also comprises a supply device configured to adjust the quiescent current for the end stage depending on a specific dynamics request for the end stage.

Inventor(s): Oliver HERBST

CPC Classification: G03F7/70266 (PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices ; photosensitive materials or processes for photographic purposes ; electrophotography, sensitive layers or processes therefor ))

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