RETICLE CONTAINER HAVING ROTATING CONNECTOR WITH SPRING FORCE LATCHING

Abstract: reticle containers include a rotating latch including a spring. the spring provides force bringing the segments of the reticle container towards one another such that a reticle in the container is clamped between the container segments. the rotating latch can include a head as part of an assembly on one of a cover or a baseplate of the reticle container, with a slot configured to accommodate the head provided on the other of the cover or baseplate. the head can be disposed at an end of a shaft, with the shaft connected to a base, which is contacted by spring providing force such that the contact of the head with the other of the cover or baseplate provides clamping force to a reticle stored between the cover and baseplate.

Inventor(s): Russ V. Raschke, Brian Wiseman, Matthew Reber

CPC Classification: G03F1/66 (PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices ; photosensitive materials or processes for photographic purposes ; electrophotography, sensitive layers or processes therefor ))

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