20250180890. Micro-optical Element (Carl Zeiss SMT)

MICRO-OPTICAL ELEMENT

Abstract: an actuator device for a tiltable micro-optical element comprises a plurality of stacked comb drives.

Inventor(s): Yanko SAROV, Markus HAUF, Ulrich WEBER, Ralf AMELING

CPC Classification: G02B26/0841 (OPTICAL ELEMENTS, SYSTEMS OR APPARATUS)

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