PROBE TIP X-Y LOCATION IDENTIFICATION USING A CHARGED PARTICLE BEAM

Abstract: an automated system for controlling a conductive probe of a nanoprober system in situ to a charged particle beam (cpb) imaging system can include a nanoprober comprising an actuator and a conductive probe; signal measurement circuitry electrically coupled to the conductive probe and to receive an electrical signal from the conductive probe; and a hardware processor to execute operations. the operations can include activating a cpb within a first reference frame, the first reference frame associated with the cpb; causing, by a computerized control system, the cpb and the conductive probe to intersect; measuring an electrical response from the intersection of the cpb with the conductive probe; and determining a location of the conductive probe in a second reference frame based on the electric response from the intersection of the cpb with the conductive probe, the second reference frame associated with the conductive probe.

Inventor(s): Richard E. Stallcup, II, Michael Berkmyre, Ronen Benzion, Carlo Floresca

CPC Classification: G01Q20/00 (Monitoring the movement or position of the probe)

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