MEMS INERTIAL SENSOR WITH HIGH RESISTANCE TO STICTION

Abstract: an inertial structure is elastically coupled through a first elastic structure to a supporting structure so as to move along a sensing axis as a function of a quantity to be detected. the inertial structure includes first and second inertial masses which are elastically coupled together by a second elastic structure to enable movement of the second inertial mass along the sensing axis. the first elastic structure has a lower elastic constant than the second elastic structure so that, in presence of the quantity to be detected, the inertial structure moves in a sensing direction until the first inertial mass stops against a stop structure and the second elastic mass can move further in the sensing direction. once the quantity to be detected ends, the second inertial mass moves in a direction opposite to the sensing direction and detaches the first inertial mass from the stop structure.

Inventor(s): Gabriele GATTERE, Francesco RIZZINI, Alessandro TOCCHIO

CPC Classification: G01P15/125 (by capacitive pick-up)

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