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20250180484. Apparatus Method Fluores (Orbotech .)

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APPARATUS AND METHOD FOR FLUORESCENCE DETECTION IN ELECTRONIC DEVICES WITH HIGH BRIGHTNESS COAXIAL DIODE LASER ILLUMINATION

Abstract: the system includes a laser light source configured to emit laser light; an optical fiber coupled to the laser light source and configured to guide the laser light along an illumination path; and an illumination optical assembly disposed in the illumination path and configured to direct the laser light on a workpiece. the workpiece emits fluorescent light along an emission path based on illumination from the laser light. the system further includes a collection optical assembly disposed in the emission path and configured to separate the fluorescent light from reflected laser light; and a detector disposed in the emission path and configured to generate one or more fluorescence images based on the fluorescent light.

Inventor(s): Ophir Eyal, Ilia Lutsker, Ofir Shnit, Oded Mor

CPC Classification: G01N21/6489 (INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing processes other than immunoassay, involving enzymes or microorganisms , ))

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