RADIATION SHIELD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

Abstract: a radiation shield includes a shield plate that includes a first portion, a second portion, and a plurality of pin holes that pass through the shield plate. the first portion includes a plurality of through holes that pass through the shield plate, and the second portion does not include the plurality of through holes.

Inventor(s): Yongkeun Kang, Sunguk Kim, Jeonghoon Shin, Daegyu Lim, Jinwoong Cho, Taepyo Hong, Hosang Ryu, Sanghyun Byun, Semin Lee, Sangchul Han

CPC Classification: C23C16/52 (Controlling or regulating the coating process {(, take precedence)})

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