SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

Abstract: according to the technique of the present disclosure, there is provided a heater comprising a heat generating element divided into at least a central portion and an outer peripheral portion. the heat generating element is configured to be capable of adjusting a heating amount of each of the central portion and the outer peripheral portion. end portions of the outer peripheral portion are not adjacent to outermost turnaround portions of the heat generating element. further, turnaround portions of the heat generating element are not adjacent to the end portions in a direction outward from a center of the heat generating element in the outer peripheral portion of the heat generating element.

Inventor(s): Tetsuya KOSUGI, Hitoshi MURATA, Shuhei SAIDO

CPC Classification: C23C16/46 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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