SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING SYSTEMS FOR IMPROVING DEPOSITION THICKNESS UNIFORMITY

Abstract: a showerhead assembly includes a showerhead with an upper portion including a gas channel extending in a first direction and having a first width in a second direction. a lower portion is connected to the upper portion and includes a faceplate including a plurality of gas through holes extending vertically through the faceplate in the first direction and a baffle plate arranged on a plurality of posts above the faceplate and below an outlet of the gas channel. a gas plenum is defined between the upper portion and the lower portion, extends in the second direction, and is in fluid communication with the gas channel. the showerhead assembly includes a back side gas system to supply gas to a bellows volume defined by a bellows arranged around an upper portion of the showerhead. first and second annular gas flows are supplied across an outer surface of the showerhead.

Inventor(s): Eli JEON, Daniel BOATRIGHT, Philip CHEN, Debotosh PODDAR, Kyle Watt HART, Douglas Walter AGNEW, Kashyap SUBRAMANYA

CPC Classification: C23C16/45565 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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