20250178970. Methods Making Sic Boules (Pallldus, .)
Methods of Making SiC Boules and Wafers
Abstract: organosilicon chemistry, polymer derived ceramic materials, and methods. such materials and methods for making polysilocarb (sioc) and silicon carbide (sic) materials having 3-nines, 4-nines, 6-nines and greater purity. processes for making sic boules and sic wafers utilizing such high purity sioc and sic.
Inventor(s): Douglas M. Dukes, Ashish P. Diwanji, Andrew P. Hopkins, Walter J. Shenwood, Glenn Sandgren, Mark S. Land, Brian L. Benac
CPC Classification: C04B35/571 (obtained from {Si-containing} polymer precursors {or organosilicon monomers})
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