ESD PREVENTION BY RESISTIVE COATINGS OF ROBOT END EFFECTOR FINGERS AND CONDUCTIVE PAD

Abstract: an end effector for a substrate supporting and transferring system includes a wrist, a plurality of electrically insulative substrate support members extending from the wrist and having a proximal portion supported therein, the substrate supporting member including a substrate facing surface, a conductive coating, and at least a first conductive member disposed upon and in electrical contact with the conductive coating, the conductive coating extending from the conductive member to the proximal end of the support member; and a connection member extending between the conductive coating and the wrist. in one aspect, the conductive member includes a conformable or compliant conductive element, coupled to a conductive plate.

Inventor(s): Srikanth V. RACHERLA, Makoto INAGAWA, Tsunehiko KITAMURA

CPC Classification: B25J19/0075 ({Means for protecting the manipulator from its environment or vice versa})

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