METHOD FOR PRODUCING A DONOR SUBSTRATE FOR TRANSFERRING A PIEZOELECTRIC LAYER, AND METHOD FOR TRANSFERRING A PIEZOELECTRIC LAYER TO A CARRIER SUBSTRATE

Abstract: a method of manufacturing a donor substrate for the transfer of a piezoelectric layer onto a support substrate comprises providing a handling substrate and providing a piezoelectric substrate. a polymer layer is deposited on the handling substrate or the piezoelectric substrate. an intermediate layer is formed on a free surface of the piezoelectric substrate, and the piezoelectric substrate is assembled on the handling substrate such that the intermediate layer formed on the piezoelectric substrate is between the polymer layer and the piezoelectric substrate to form the donor substrate. a donor substrate may be manufactured by such a method, and such a donor substrate may be used for transferring a piezoelectric layer to another substrate.

Inventor(s): Marcel Broekaart, Cédric Charles-Alfred, Luciana Capello, Morgane Logiou, Thierry Barge

CPC Classification: H10N30/073 (by fusion of metals or by adhesives)

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