SEMICONDUCTOR DEVICE WITH FISH BONE STRUCTURE AND METHODS OF FORMING THE SAME

Abstract: semiconductor device and the manufacturing method thereof are disclosed. an exemplary semiconductor device comprises a first semiconductor stack and a second semiconductor stack over a substrate, wherein each of the first and second semiconductor stacks includes semiconductor layers stacked up and separated from each other; a dummy spacer between the first and second semiconductor stacks, wherein the dummy spacer contacts a first sidewall of each semiconductor layer of the first and second semiconductor stacks; and a gate structure wrapping a second sidewall, a top surface, and a bottom surface of each semiconductor layer of the first and second semiconductor stacks.

Inventor(s): Chih-Chuan Yang, Kuo-Hsiu Hsu

CPC Classification: H10D30/6757 (No explanation available)

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